Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics : Symposium held April 5-9, 2010, San Francisco, California /

Bibliographic Details
Corporate Authors:	Symposium E, "Chemical Mechanical Planarization as a Semiconductor Technology Enabler" San Francisco, Calif., Materials Research Society. Fall Meeting
Other Authors:	Bartha, Johann W.
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2010]
Series:	Materials Research Society symposia proceedings ; v. 1249.
Subjects:	Chemical mechanical planarization > Congresses. Microelectronics > Congresses. Nanoelectronics > Congresses.

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