APA (7th ed.) Citation

Levinson, H. J. (2010). Principles of lithography (3rd ed.). SPIE Press.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. 3rd ed. Bellingham, Wash.: SPIE Press, 2010.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. 3rd ed. SPIE Press, 2010.

Warning: These citations may not always be 100% accurate.