Principles of lithography /

The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices. This text is intended to serve as...

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Bibliographic Details

Main Author:	Levinson, Harry J.
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Press, [2010]
Edition:	3rd ed.
Subjects:	Integrated circuits > Design and construction. Microlithography.