Rare-earth implanted MOS devices for silicon photonics : microstructural, electrical and optoelectronic properties /

Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Rebohle, Lars, Skorupa, Wolfgang
Format:	eBook
Language:	English
Published:	Heidelberg : Springer, 2010.
Series:	Springer series in materials science ; 142.
Subjects:	Metal oxide semiconductors. Electronic books.
Online Access:	Connect to the full text of this electronic book