Fabrication and design of resonant microdevices /

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, a...

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Bibliographic Details

Main Author:	Bahreyni, Behraad
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Norwich, NY : W. Andrew Inc., [2008]
Series:	Micro & nano technologies ; 3.
Subjects:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Online Access:	Connect to the full text of this electronic book