Fundamental principles of engineering nanometrology /

The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...

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Bibliographic Details

Main Author:	Leach, R. K.
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Oxford : Amsterdam : William Andrew ; Elsevier Science, [2010]
Edition:	1st ed.
Series:	Micro & nano technologies.
Subjects:	Nanotechnology. Microtechnology. Metrology. Electronic books.
Online Access:	Connect to the full text of this electronic book