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Handbook of silicon based MEMS materials and technologies /

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Bibliographic Details
Other Authors: Lindroos, Veikko
Format: Book
Language:English
Published: Amsterdam ; Boston : Elsevier/William Andrew, [2010]
Edition:1st ed.
Series:Micro & nano technologies.
Subjects:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
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