Handbook of silicon based MEMS materials and technologies /

Bibliographic Details
Other Authors:	Lindroos, Veikko
Format:	Book
Language:	English
Published:	Amsterdam ; Boston : Elsevier/William Andrew, [2010]
Edition:	1st ed.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties.

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