Handbook of silicon based MEMS materials and technologies /

Bibliographic Details
Other Authors:	Lindroos, Veikko
Format:	Book
Language:	English
Published:	Amsterdam ; Boston : Elsevier/William Andrew, [2010]
Edition:	1st ed.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties.

Description
Physical Description:	xxxii, 636 pages : illustrations ; 29 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	9780815515944 (hbk.) 0815515944 (hbk.)