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Patterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material /

Bibliographic Details
Main Author: Zakar, Eugene
Corporate Author: U.S. Army Research Laboratory
Other Authors: Grapes, Michael D.
Format: Government Document eBook
Language:English
Published: Adelphi, MD : Army Research Laboratory, [2009] [date of publication not identified]
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 4956.
Subjects:
Microelectromechanical systems.
Thick films.
Polymers.
Online Access:https://purl.fdlp.gov/GPO/LPS120395
Description
Item Description:Title from title screen (viewed Mar. 12, 2010).
"September 2009."
Electronic resource.
Physical Description:1 online resource (vi, 16 pages) : illustrations (some color).
Bibliography:Includes bibliographical references (page 14).