Patterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material /

Bibliographic Details

Main Author:	Zakar, Eugene
Corporate Author:	U.S. Army Research Laboratory
Other Authors:	Grapes, Michael D.
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, [2009] [date of publication not identified]
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 4956.
Subjects:	Microelectromechanical systems. Thick films. Polymers.
Online Access:	https://purl.fdlp.gov/GPO/LPS120395