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Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors: Materials Research Society. Meeting, Symposium DD, "Microelectromechanical Systems--Materials and Devices III"
Other Authors: Bagdahn, Jörg
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2010]
Series:Materials Research Society symposia proceedings ; v. 1222.
Subjects:
Microelectromechanical systems > Materials > Congresses.
Microelectromechanical systems > Congresses.
Thin films > Congresses.
Nanostructured materials > Congresses.
Silicon > Congresses.
Description
Item Description:"... papers presented at Symposium DD, 'Microelectromechanical Systems--Materials and Devices III,' held November 30-December 2 at the 2009 MRS Fall Meeting in Boston, Massachusetts"-- preface.
Physical Description:ix, 211 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:9781605111957
1605111953
ISSN:1946-4274 ;