Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Meeting, Symposium DD, "Microelectromechanical Systems--Materials and Devices III"
Other Authors:	Bagdahn, Jörg
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2010]
Series:	Materials Research Society symposia proceedings ; v. 1222.
Subjects:	Microelectromechanical systems > Materials > Congresses. Microelectromechanical systems > Congresses. Thin films > Congresses. Nanostructured materials > Congresses. Silicon > Congresses.

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