Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. /
| Corporate Author: | Materials Research Society. Meeting Symposium E. |
|---|---|
| Other Authors: | Kumar, Ashok, 1962- |
| Format: | Book |
| Language: | English |
| Published: |
Warrendale, Penn. :
Materials Research Society,
[2010]
|
| Series: | Materials Research Society symposia proceedings ;
v. 1157. |
| Subjects: |
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