Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society. Meeting Symposium E.
Other Authors:	Kumar, Ashok, 1962-
Format:	Book
Language:	English
Published:	Warrendale, Penn. : Materials Research Society, [2010]
Series:	Materials Research Society symposia proceedings ; v. 1157.
Subjects:	Chemical mechanical planarization > Congresses. Semiconductors > Design and construction > Congresses.

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