| Tag |
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| LEADER |
00000cam a2200000 a 4500 |
| 001 |
in00002578521 |
| 005 |
20151201152731.0 |
| 008 |
100505s2010 paua b 101 0 eng d |
| 020 |
|
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|a 1605111309
|
| 020 |
|
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|a 9781605111308
|
| 035 |
|
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|a (OCoLC)ocn611870712
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| 040 |
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|a YDXCP
|c YDXCP
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|a TXAM
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| 090 |
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|a TK7871
|b .M39 2009
|
| 110 |
2 |
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|a Materials Research Society.
|b Meeting
|d (2009 :
|c San Francisco, Calif.)
|b Symposium E.
|
| 245 |
1 |
0 |
|a Science and technology of chemical mechanical planarization (CMP) :
|b symposium held April 14-16, 2009, San Francisco, California, U.S.A. /
|c editors, Ashok Kumar [and others].
|
| 264 |
|
1 |
|a Warrendale, Penn. :
|b Materials Research Society,
|c [2010]
|
| 264 |
|
4 |
|c ©2010
|
| 300 |
|
|
|a ix, 165 pages :
|b illustrations ;
|c 24 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Materials Research Society symposium proceedings ;
|v v. 1157
|
| 504 |
|
|
|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Chemical mechanical planarization
|v Congresses.
|
| 650 |
|
0 |
|a Semiconductors
|x Design and construction
|v Congresses.
|
| 700 |
1 |
|
|a Kumar, Ashok,
|d 1962-
|
| 830 |
|
0 |
|a Materials Research Society symposia proceedings ;
|v v. 1157.
|
| 945 |
|
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|a PromptCat
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| 948 |
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|a cataloged
|b h
|c 2010/7/13
|d c
|e dmitchel
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|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
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|e TK7871 .M39 2009
|h Library of Congress classification
|i unmediated -- volume
|m A14840185091
|
| 998 |
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