Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. /
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| Format: | Book |
| Language: | English |
| Published: |
Warrendale, Penn. :
Materials Research Society,
[2010]
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| Series: | Materials Research Society symposia proceedings ;
v. 1157. |
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| Physical Description: | ix, 165 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1605111309 9781605111308 |