APA (7th ed.) Citation

Materials Research Society. Meeting Symposium E. & Kumar, A. (2010). Science and technology of chemical mechanical planarization (CMP): Symposium held April 14-16, 2009, San Francisco, California, U.S.A. Materials Research Society.

Chicago Style (17th ed.) Citation

Materials Research Society. Meeting Symposium E. and Ashok Kumar. Science and Technology of Chemical Mechanical Planarization (CMP): Symposium Held April 14-16, 2009, San Francisco, California, U.S.A. Warrendale, Penn.: Materials Research Society, 2010.

MLA (9th ed.) Citation

Materials Research Society. Meeting Symposium E. and Ashok Kumar. Science and Technology of Chemical Mechanical Planarization (CMP): Symposium Held April 14-16, 2009, San Francisco, California, U.S.A. Materials Research Society, 2010.