Precision nanometrology : sensors and measuring systems for nanomanufacturing /
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| Format: | eBook |
| Language: | English |
| Published: |
London :
Springer,
2010.
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| Series: | Springer series in advanced manufacturing.
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | pages cm. |
| ISBN: | 1849962545 9781849962544 |
| DOI: | 10.1007/978-1-84996-254-4 |