Precision nanometrology : sensors and measuring systems for nanomanufacturing /

Bibliographic Details
Main Author:	Gao, Wei, Ph. D.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	London : Springer, 2010.
Series:	Springer series in advanced manufacturing.
Subjects:	Nanostructured materials > Measurement. Electronic books.
Online Access:	Connect to the full text of this electronic book

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