Multi-wafer rotating MEMS machines : turbines, generators, and engines /

Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Lang, Jeffrey (Jeffrey H.)
Format:	eBook
Language:	English
Published:	New York ; London : Springer, 2009.
Series:	MEMS reference shelf.
Subjects:	Microelectromechanical systems. Turbomachines. Electronic books.
Online Access:	Connect to the full text of this electronic book