Frontiers of characterization and metrology for nanoelectronics : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009 /

Bibliographic Details
Corporate Author:	International Conference on Frontiers of Characterization and Metrology for Nanoelectronics Albany, N.Y.
Other Authors:	Seiler, David G. (Editor)
Format:	Conference Proceeding Book
Language:	English
Published:	Melville, N.Y. : AIP Conference Proceedings, 2009.
Series:	AIP conference proceedings ; no. 1173.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

Description
Item Description:	Previous conferences entitled: Characterization and metrology for ULSI technology.
Physical Description:	xii, 398 pages : illustrations ; 28 cm.+e 1 CD-ROM (4 3/4 in).
Bibliography:	Includes bibliographical references and indexes.
ISBN:	9780735407121 (hbk.) 0735407126 (hbk.)
ISSN:	0094-243X ;