Frontiers of characterization and metrology for nanoelectronics : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009 /

Bibliographic Details
Corporate Author:	International Conference on Frontiers of Characterization and Metrology for Nanoelectronics Albany, N.Y.
Other Authors:	Seiler, David G. (Editor)
Format:	Conference Proceeding Book
Language:	English
Published:	Melville, N.Y. : AIP Conference Proceedings, 2009.
Series:	AIP conference proceedings ; no. 1173.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

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