Cover Image

Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors: Materials Research Society. Meeting Symposium GG, Symposium GG, "Microelectromechanical systems--Materials and Devices II"
Other Authors: Vengallatore, Srikar
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2009]
Series:Materials Research Society symposia proceedings ; v. 1139.
Subjects:
Microelectromechanical systems > Materials > Congresses.
Microelectromechanical systems > Congresses.
Thin films > Congresses.
Nanostructured materials > Congresses.
Silicon > Congresses.
Description
Item Description:"This proceedings volume reports on research presented at [...] Symposium GG, 'Microelectromechanical Systems--Materials and Devices II,' which was held December 1-2 at the 2008 MRS Fall Meeting in Boston, Massachusetts"--Preface, p. xi.
Physical Description:xi, 247 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:9781605111117
1605111112
ISSN:1946-4274 ;