Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Meeting Symposium GG, Symposium GG, "Microelectromechanical systems--Materials and Devices II"
Other Authors:	Vengallatore, Srikar
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2009]
Series:	Materials Research Society symposia proceedings ; v. 1139.
Subjects:	Microelectromechanical systems > Materials > Congresses. Microelectromechanical systems > Congresses. Thin films > Congresses. Nanostructured materials > Congresses. Silicon > Congresses.

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