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Optimization of PbTiO₃ seed layers for PZT MEMS actuators /

Bibliographic Details
Main Author: Sanchez, Luz
Corporate Author: U.S. Army Research Laboratory
Other Authors: Polcawich, Ronald G.
Format: Government Document eBook
Language:English
Published: Adelphi, MD : Army Research Laboratory, [2008]
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 4697.
Subjects:
Ferroelectric crystals.
Ferroelectric thin films.
Online Access:https://purl.fdlp.gov/GPO/LPS109119
Description
Item Description:Title from title screen (viewed Feb. 19, 2009).
"December 2008."
Electronic resource.
Physical Description:vi, 22 pages : digital, PDF file.
Format:Mode of access: Internet from ARL web site. Address as of 2/19/2009: http://www.arl.army.mil/arlreports/2008/ARL-TR-4697.pdf ; current access via PURL.
Bibliography:Includes bibliographical references (page 20).