Optimization of PbTiO₃ seed layers for PZT MEMS actuators /

Bibliographic Details

Main Author:	Sanchez, Luz
Corporate Author:	U.S. Army Research Laboratory
Other Authors:	Polcawich, Ronald G.
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, [2008]
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 4697.
Subjects:	Ferroelectric crystals. Ferroelectric thin films.
Online Access:	https://purl.fdlp.gov/GPO/LPS109119