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Defects in microelectronic materials and devices /

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Bibliographic Details
Other Authors: Fleetwood, D. M. (Dan M.), Pantelides, Sokrates T., Schrimpf, Ronald Donald
Format: Book
Language:English
Published: Boca Raton : CRC Press, [2009]
Subjects:
Microelectronics > Materials > Testing.
Metal oxide semiconductor field-effect transistors > Testing.
Integrated circuits > Defects.
Online Access:Table of contents only
Description
Physical Description:xvi, 753 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1420043765 (alk. paper)
9781420043761 (alk. paper)