APA (7th ed.) Citation

Fleetwood, D. M., Pantelides, S. T., & Schrimpf, R. D. (2009). Defects in microelectronic materials and devices. CRC Press.

Chicago Style (17th ed.) Citation

Fleetwood, D. M., Sokrates T. Pantelides, and Ronald Donald Schrimpf. Defects in Microelectronic Materials and Devices. Boca Raton: CRC Press, 2009.

MLA (9th ed.) Citation

Fleetwood, D. M., et al. Defects in Microelectronic Materials and Devices. CRC Press, 2009.