Reactive sputter deposition /

Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Depla, D. (Diederik), Mahieu, S. (Stijn)
Format:	eBook
Language:	English
Published:	Berlin : Springer, [2008]
Series:	Springer series in materials science ; 109.
Subjects:	Cathode sputtering (Plating process) Thin films. Electronic books.
Online Access:	Connect to the full text of this electronic book