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Micromachined thin-film sensors for SOI-CMOS co-integration /

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Bibliographic Details
Main Author: Laconte, J.
Corporate Author: SpringerLink (Online service)
Other Authors: Flandre, Denis, Raskin, J.-P
Format: eBook
Language:English
Published: Dordrecht : Springer, 2006.
Subjects:
Gas flow.
Metal oxide semiconductors, Complementary.
Silicon-on-insulator technology.
Thin film devices.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xiii, 292 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0387288430
9780387288437
DOI:10.1007/0-387-28843-0