Micromachined thin-film sensors for SOI-CMOS co-integration /

Bibliographic Details

Main Author:	Laconte, J.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Flandre, Denis, Raskin, J.-P
Format:	eBook
Language:	English
Published:	Dordrecht : Springer, 2006.
Subjects:	Gas flow. Metal oxide semiconductors, Complementary. Silicon-on-insulator technology. Thin film devices. Electronic books.
Online Access:	Connect to the full text of this electronic book