Micromechanical photonics /
| Main Author: | Ukita, H. (Hiroo) |
|---|---|
| Corporate Author: | SpringerLink (Online service) |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin :
Springer-Verlag,
[2006]
|
| Series: | Microtechnology and MEMS.
|
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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