Micromechanical photonics /

Bibliographic Details

Main Author:	Ukita, H. (Hiroo)
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin : Springer-Verlag, [2006]
Series:	Microtechnology and MEMS.
Subjects:	Microelectromechanical systems. Microelectronics. Photonics. Electronic books.
Online Access:	Connect to the full text of this electronic book