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Micromechanical photonics /

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Bibliographic Details
Main Author: Ukita, H. (Hiroo)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin : Springer-Verlag, [2006]
Series:Microtechnology and MEMS.
Subjects:
Microelectromechanical systems.
Microelectronics.
Photonics.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:xi, 250 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540313729
9783540313724
ISSN:1615-8326
DOI:10.1007/978-3-540-31372-4