Precursor chemistry of advanced materials : CVD, ALD and nanoparticles /

Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Fischer, Roland A.
Format:	eBook
Language:	English
Published:	Berlin ; [London] : Springer, 2005.
Series:	Topics in organometallic chemistry ; 9.
Subjects:	Chemical vapor deposition. Organometallic chemistry. Electronic books.
Online Access:	Connect to the full text of this electronic book Publisher description