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Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices /

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Bibliographic Details
Corporate Authors: NATO Advanced Research Workshop on Defects in High-k Dielectric Nano-electronic Semiconductor Devices Saint Petersburg, Russia, SpringerLink (Online service)
Other Authors: Gusev, Evgeni
Format: Conference Proceeding eBook
Language:English
Published: Dordrecht : Springer, [2006]
Series:NATO science series. Mathematics, physics, and chemistry ; v. 220.
Subjects:
Dielectrics > Congresses.
Gate array circuits > Congresses.
Semiconductors > Defects > Congresses.
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