SpringerLink (Online service) & Setter, N. (2005). Electroceramic-based MEMS: Fabrication-technology and applications. Springer Science+Business Media. https://doi.org/10.1007/b101200
Chicago Style (17th ed.) CitationSpringerLink (Online service) and N. Setter. Electroceramic-based MEMS: Fabrication-technology and Applications. New York: Springer Science+Business Media, 2005. https://doi.org/10.1007/b101200.
MLA (9th ed.) CitationSpringerLink (Online service) and N. Setter. Electroceramic-based MEMS: Fabrication-technology and Applications. Springer Science+Business Media, 2005. https://doi.org/10.1007/b101200.
Warning: These citations may not always be 100% accurate.