Electroceramic-based MEMS : fabrication-technology and applications /

Bibliographic Details

Corporate Author:	SpringerLink (Online service)
Other Authors:	Setter, N. (Nava), 1949-
Format:	eBook
Language:	English
Published:	New York : Springer Science+Business Media, [2005]
Series:	Electronic materials: science & technology.
Subjects:	Microelectromechanical systems. Electronic books.
Online Access:	Connect to the full text of this electronic book