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Mechanics of microelectromechanical systems /

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Bibliographic Details
Main Author: Lobontiu, Nicolae
Corporate Author: SpringerLink (Online service)
Other Authors: Garcia, E. (Ephrahim)
Format: eBook
Language:English
Published: New York ; [Great Britain] : Kluwer Academic, [2005]
Subjects:
Microelectromechanical systems.
Micromachines.
Electronic books.
Online Access:Connect to the full text of this electronic book
Publisher description
Description
Item Description:Electronic resource.
Physical Description:xi, 405 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0387230378
9780387230375
DOI:10.1007/b100026