Mechanics of microelectromechanical systems /

Bibliographic Details

Main Author:	Lobontiu, Nicolae
Corporate Author:	SpringerLink (Online service)
Other Authors:	Garcia, E. (Ephrahim)
Format:	eBook
Language:	English
Published:	New York ; [Great Britain] : Kluwer Academic, [2005]
Subjects:	Microelectromechanical systems. Micromachines. Electronic books.
Online Access:	Connect to the full text of this electronic book Publisher description