Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures /
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[2005]
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | xii, 221 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3540268766 9783540268765 |
| DOI: | 10.1007/b138230 |