Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures /

Bibliographic Details

Main Author:	Frühauf, Joachim
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin ; New York : Springer, [2005]
Subjects:	Detectors. Silicon. Electronic books.
Online Access:	Connect to the full text of this electronic book