Micro process engineering : fundamentals, devices, fabrication, and applications /
| Corporate Author: | |
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2006]
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| Series: | Advanced micro & nanosystems ;
5. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book Contributor biographical information Publisher description Table of contents only |
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