Micro process engineering : fundamentals, devices, fabrication, and applications /
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2006]
|
| Series: | Advanced micro & nanosystems ;
5. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book Contributor biographical information Publisher description Table of contents only |
Internet
Connect to the full text of this electronic bookContributor biographical information
Publisher description
Table of contents only
Available Online
| Call Number: |
TS183 .M52 2006eb |
|
|---|---|---|
| Call Number | Status | Get It |
| TS183 .M52 2006eb | Available | |