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Micro process engineering : fundamentals, devices, fabrication, and applications /

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Bibliographic Details
Corporate Author: Wiley InterScience (Online service)
Other Authors: Kockmann, Norbert
Format: eBook
Language:English
Published: Weinheim : Wiley-VCH, [2006]
Series:Advanced micro & nanosystems ; 5.
Subjects:
Microtechnology.
Production engineering.
Electronic books.
Online Access:Connect to the full text of this electronic book
Contributor biographical information
Publisher description
Table of contents only
Description
Item Description:Electronic resource.
Physical Description:xxii, 507 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3527616748
9783527616749
DOI:10.1002/9783527616749