CMOS-MEMS /

Bibliographic Details

Corporate Author:	Wiley InterScience (Online service)
Other Authors:	Brand, Oliver, 1964-, Fedder, G. K. (Gary K.)
Format:	eBook
Language:	English
Published:	Weinheim ; [Great Britain] : Wiley-VCH, [2005]
Series:	Advanced micro & nanosystems ; v. 2.
Subjects:	Metal oxide semiconductors, Complementary. Microelectromechanical systems. Electronic books.
Online Access:	Connect to the full text of this electronic book