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Fundamental principles of optical lithography : the science of microfabrication /

Bibliographic Details
Main Author: Mack, Chris A.
Corporate Author: Wiley InterScience (Online service)
Format: eBook
Language:English
Published: Hoboken, N.J. : Wiley, 2007.
Subjects:
Integrated circuits > Design and construction.
Microlithography > Industrial applications.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:pages cm.
ISBN:0470723874
9780470723876
DOI:10.1002/9780470723876