Fundamental principles of optical lithography : the science of microfabrication /

Bibliographic Details
Main Author:	Mack, Chris A.
Corporate Author:	Wiley InterScience (Online service)
Format:	eBook
Language:	English
Published:	Hoboken, N.J. : Wiley, 2007.
Subjects:	Integrated circuits > Design and construction. Microlithography > Industrial applications. Electronic books.
Online Access:	Connect to the full text of this electronic book

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