APA (7th ed.) Citation

Mack, C. A. (2007). Fundamental principles of optical lithography: The science of microfabrication. Wiley. https://doi.org/10.1002/9780470723876

Chicago Style (17th ed.) Citation

Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Hoboken, N.J.: Wiley, 2007. https://doi.org/10.1002/9780470723876.

MLA (9th ed.) Citation

Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Wiley, 2007. https://doi.org/10.1002/9780470723876.